Not to sticky
Datum:12.02.25
An innovative surface treatment from Trelleborg Sealing Solutions for elastomer components in semiconductor manufacturing is helping extend periods between planned maintenance, lowering overall cost of ownership for FABs.
Elastomers are critical materials for sealing and damping semiconductor manufacturing applications. They prevent leakage, offer insulation, sustain pressure, maintain vacuum integrity, limit contamination, provide damping properties, and ensure the overall efficiency of semiconductor production equipment.
Stiction is an issue
“One factor that can have a significant detrimental impact on a seal’s performance is the inherent stickiness or stiction of elastomers, which means that seals tend to adhere to countersurfaces,” says Murat Gulcur, Technical Director for semiconductors.
“In static sealing applications, elastomer parts that stick in grooves can result in prolonged downtime to clean off seal residues from sealing surfaces and to replace seals, disrupting preventative maintenance cycles and leading to a loss in productivity,” he continues. “In dynamic applications, elastomers sticking onto a countersurface can prevent moving parts from working efficiently, especially after periods of rest.”
Minimizing stiction
It is therefore important to minimize the stiction properties of elastomer seals to improve the productivity of semiconductor manufacturing equipment.
Murat explains that Isolast® PureFab™ materials, the Trelleborg Sealing Solutions range of perfluoroelastomer (FFKM) compounds specifically developed for semiconductor applications, exhibit outstanding low stiction properties. “That means in many cases they operate at the optimum level for an application without further treatment. However, for applications that need extremely low stiction, our unique Seal-Glide® chemical vapor deposition treatment can lower stiction even further.”
Unique Seal-Glide surface treatment
Compared to other surface treatments, such as polytetrafluoroethylene (PTFE) coating and chlorination, Seal-Glide® is more sanitary, sustainable, and less chemically aggressive. It also applies more easily to components with complex geometries.
“It’s up to 50 times thinner than conventional coatings, meaning it does not negatively affect the physical properties of a seal,” Murat points out.
Aiming to understand the effectiveness of Seal-Glide® in reducing and limiting stiction, Trelleborg Sealing Solutions undertook in-house developed tests. “In these we used the Seal-Glide® surface treatment with a variety of our Isolast® PureFab™ FFKM materials and one FKM compound, all of which are commonly used for seals in semiconductor processing equipment,” continues Murat.
Stiction is an issue
“One factor that can have a significant detrimental impact on a seal’s performance is the inherent stickiness or stiction of elastomers, which means that seals tend to adhere to countersurfaces,” says Murat Gulcur, Technical Director for semiconductors.
“In static sealing applications, elastomer parts that stick in grooves can result in prolonged downtime to clean off seal residues from sealing surfaces and to replace seals, disrupting preventative maintenance cycles and leading to a loss in productivity,” he continues. “In dynamic applications, elastomers sticking onto a countersurface can prevent moving parts from working efficiently, especially after periods of rest.”
Minimizing stiction
It is therefore important to minimize the stiction properties of elastomer seals to improve the productivity of semiconductor manufacturing equipment.
Murat explains that Isolast® PureFab™ materials, the Trelleborg Sealing Solutions range of perfluoroelastomer (FFKM) compounds specifically developed for semiconductor applications, exhibit outstanding low stiction properties. “That means in many cases they operate at the optimum level for an application without further treatment. However, for applications that need extremely low stiction, our unique Seal-Glide® chemical vapor deposition treatment can lower stiction even further.”
Unique Seal-Glide surface treatment
Compared to other surface treatments, such as polytetrafluoroethylene (PTFE) coating and chlorination, Seal-Glide® is more sanitary, sustainable, and less chemically aggressive. It also applies more easily to components with complex geometries.
“It’s up to 50 times thinner than conventional coatings, meaning it does not negatively affect the physical properties of a seal,” Murat points out.
Aiming to understand the effectiveness of Seal-Glide® in reducing and limiting stiction, Trelleborg Sealing Solutions undertook in-house developed tests. “In these we used the Seal-Glide® surface treatment with a variety of our Isolast® PureFab™ FFKM materials and one FKM compound, all of which are commonly used for seals in semiconductor processing equipment,” continues Murat.